Compact thin-film lithium niobate modulators using slotted coplanar waveguide electrode suitable for high-volume fabrication

Abstract Lithium niobate (LN) is a good candidate for fabricating modulators due to its superior material characteristics. However, the application of traditional LN modulators is limited due to their large footprint and low modulation efficiency resulting from weak optical confinement. In recent years, with the development of the thin-film lithium niobate (TFLN) platform and LN etching technology, the size of the optical mode of the TFLN modulator is 20 times smaller than that of the traditional LN modulator. Furthermore, TFLN modulators have demonstrated a wide bandwidth, low half-wave voltage and small footprint in recent reports. The length of the TFLN modulators can be further reduced by employing a folded design and therefore applicable to compact transceiver package, such as being packaged in the quad small form factor pluggable double density transceiver. In this paper, we report on a folded TFLN modulator fabricated from a 4 inch LN wafer, which is suitable for large-volume fabrication. A fiber-to-fiber insertion loss of 2.5 dB and a voltage–length product of 1.85 V cm have been achieved. The measured electro-optic response curve has a 2.3 dB roll-off at 40 GHz, and the simulated 3 dB bandwidth reaches 65 GHz. Compared to traditional coplanar waveguide traveling wave electrodes, the slotted coplanar waveguide traveling wave electrode (slotted CPW-TWE) design adopted in this work allows adjusting the high-speed characteristics and modulation efficiency with more flexibility. This is the first time a slotted CPW-TWE design has been applied in a folded TFLN modulator.