Fabrication and characteristics of the C3+‐ion implanted and femtosecond‐laser ablated RTP 2D waveguide

Abstract In this work, a two‐dimensional (2D) waveguide on the 6.0 × 10 6 ‐eV C 3+ ‐ion implanted RbTiOPO 4 structure was prepared by the femtosecond laser under the manufacturing parameters of 3.0 μJ energy and 50.0 μm/s ablation velocity. The energy loss and damage profile were simulated by the SRIM 2013 for the irradiation with a fluence of 1 × 10 14 ions/cm 2 . The end‐face and the surface of the 2D RbTiOPO 4 crystal waveguide were characterized by a Nikon microscope. The refractive index profile and the near‐field intensity profile were studied by the ICM and the end‐face coupling technique, respectively. The RTP crystal 2D waveguide can well confine the light propagation and has the potentiality to serve as integrated photonic devices.