Role of low temperature Al(Ga)N interlayers on the polarity and quality control of GaN epitaxy

Polarity control is essential for lateral polarity heterostructures. N-polar GaN films were directly grown on high temperature AlN buffer layer. A thin low temperature AlN interlayer could invert the polarity of subsequent GaN layer to Ga-polarity but a low temperature GaN interlayer with the same condition could not do it rather deteriorate the quality of GaN film. In addition, a relationship between the yellow luminescence band and the surface roughness was discovered. The blue luminescence band was found only on the inverted Ga-polar GaN film and was connected to screw dislocation density.