Wafer-size growth of 2D layered SnSe films for UV-Visible-NIR photodetector arrays with high responsitivity

Wafer-size SnSe thin films with high uniformity and high crystal quality were grown by magnetron sputtering technique, and exhibit a highly sensitive to a broadband wavelength with high responsivity of 277.3 AW⁻¹ and detectivity of 7.6 × 1011 Jones.