ALD of SiO[sub 2] at Room Temperature Using TEOS and H[sub 2]O with NH[sub 3] as the Catalyst

催化作用 材料科学 化学工程 纳米技术 无机化学 化学 工程类 有机化学
作者
J. D. Ferguson,E.R. Smith,Alan W. Weimer,Steven M. George
出处
期刊:Journal of The Electrochemical Society [Institute of Physics]
卷期号:151 (8): G528-G528 被引量:130
标识
DOI:10.1149/1.1768548
摘要

Amine catalysts can reduce the high temperatures and long exposure times required for SiO 2 atomic layer deposition (ALD) using SiCl 4 and H 2 O reactants. One problem is that the reaction product, HCI, readily reacts with the amine catalysts to form a salt. Salt formation can be avoided by using organometallic silicon precursors. This study investigated catalyzed SiO 2 ALD on BaTiO 3 and ZrO 2 particles using alternating exposures of tetraethoxysilane (TEOS) and H 2 O at 300 K with NH3 as the catalyst. The sequential surface chemistry was monitored in a vacuum chamber using in situ transmission Fourier transform infrared (FTIR) spectroscopy. Alternating TEOS/NH 3 and H 2 O/NH 3 exposures yielded Si(OCH 2 CH 3 ) x * and SiOH* surface species, respectively, that sequentially deposited silicon and oxygen. Repetition of the TEOS and H 2 O exposures in an ABAB... reaction sequence led to the appearance of bulk SiO 2 vibrational modes. The infrared absorbance of these bulk SiO 2 vibrational modes increased with the number of AB reaction cycles. After SiO 2 deposition, the BaTiO 3 and ZrO 2 particles were examined using transmission electron microscopy (TEM). The TEM images revealed extremely uniform and conformal SiO 2 films. The measured SiO 2 film thicknesses were consistent with SiO 2 ALD growth rates of 0.7-0.8 A per AB reaction cycle. The NH 3 catalysis mechanism was also explored by monitoring the FTIR spectra of hydroxylated SiO 2 particles vs. NH 3 pressure at constant temperature and vs. temperature at constant NH 3 pressure. The spectra revealed strong hydrogen bonding between NH 3 and SiOH* surface species that activates the oxygen in SiOH* for nucleophilic attack. Catalyzed SiO 2 at room temperature should be useful for deposition of inorganic and insulating films on thermally fragile organic, polymeric, or biological substrates.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
开始旋转完成签到,获得积分10
3秒前
研学弟完成签到,获得积分10
4秒前
4秒前
专注笑珊完成签到,获得积分10
6秒前
不发一区不改名完成签到 ,获得积分10
6秒前
四十四次日落完成签到 ,获得积分10
7秒前
慕青应助yy14207采纳,获得10
7秒前
Fengzhen007完成签到,获得积分10
11秒前
zz发布了新的文献求助10
11秒前
徐慕源完成签到,获得积分10
11秒前
博慧完成签到 ,获得积分10
13秒前
Nan发布了新的文献求助10
14秒前
害羞的雁易完成签到 ,获得积分10
16秒前
MM完成签到 ,获得积分10
17秒前
Rondab应助wwl采纳,获得10
18秒前
爱笑半雪完成签到,获得积分10
20秒前
玥瑶完成签到,获得积分20
21秒前
22秒前
科研小哥完成签到,获得积分10
24秒前
韶邑完成签到,获得积分10
25秒前
美丽心情发布了新的文献求助10
25秒前
昼尽夜临完成签到 ,获得积分10
25秒前
27秒前
jyy应助yy14207采纳,获得10
27秒前
观妙散人完成签到,获得积分10
28秒前
梅零落完成签到 ,获得积分10
28秒前
哈哈哈完成签到 ,获得积分10
29秒前
ihonest完成签到,获得积分10
29秒前
yulian发布了新的文献求助10
29秒前
dt发布了新的文献求助10
32秒前
keyan完成签到 ,获得积分10
33秒前
yyx完成签到 ,获得积分10
34秒前
老实怀蝶完成签到,获得积分10
37秒前
木瓜小五哥完成签到,获得积分10
37秒前
章鱼小丸子完成签到,获得积分10
37秒前
村上春树的摩的完成签到 ,获得积分10
38秒前
222关闭了222文献求助
38秒前
Damon完成签到 ,获得积分10
39秒前
wyhhh完成签到,获得积分10
39秒前
40秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Cognitive Neuroscience: The Biology of the Mind 1000
Technical Brochure TB 814: LPIT applications in HV gas insulated switchgear 1000
Immigrant Incorporation in East Asian Democracies 600
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
A Preliminary Study on Correlation Between Independent Components of Facial Thermal Images and Subjective Assessment of Chronic Stress 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3968578
求助须知:如何正确求助?哪些是违规求助? 3513400
关于积分的说明 11167585
捐赠科研通 3248853
什么是DOI,文献DOI怎么找? 1794499
邀请新用户注册赠送积分活动 875131
科研通“疑难数据库(出版商)”最低求助积分说明 804664