Pinning Voltage Control of CMOS Image Sensor by Measuring Sheet Resistance at Micro Test Structure in Scribe Line

Pinning voltage (V _pin ) is one of the most important parameters for the performance of CMOS image sensors and should be controlled in production. In this paper, we demonstrate V _pin control by direct measurement of the sheet resistance at micro test structures using micro point probe metrology before metallization. This method is quite useful for efficient development and quality control of CMOS image sensors in mass production.