Y 2 O 3 Thin Films Characterized by XPS

Y2O3 thin films were synthesized by chemical vapor deposition (CVD) using Y(acac)3.xH2O (Hacac= 2,4-pentanedione) as precursor. This work is focused on the x-ray photoelectron spectroscopy (XPS) characterization of an Y2O3 thin film deposited on glass substrate at 450 °C in N2+O2 atmosphere and subsequently annealed in air at 1000 °C. Besides the wide scan spectrum, charge corrected binding energies for the Y 3d5/2, O 1s, and C 1s surface photoelectron signals are reported.