Atomic-scale stress modulation of nanolaminate for micro-LED encapsulation

A stress-modulation strategy combines PEALD SiO 2 (compressive stress) and thermal ALD Al 2 O 3 (tensile stress) to achieve near-zero stress SiO 2 /Al 2 O 3 nanolaminates, enhancing barrier properties and optical transparency for encapsulated micro-LEDs.