石墨烯
材料科学
纳米技术
拉曼光谱
场效应晶体管
聚合物
微加工
光刻胶
晶体管
制作
电压
物理
量子力学
医学
替代医学
病理
图层(电子)
光学
复合材料
作者
Juan Pedro Merino,Sergi Brosel‐Oliu,Gemma Rius,Xavi Illa,Manuel Vázquez Sulleiro,Elena del Corro,Eduard Masvidal‐Codina,Andrea Bonaccini Calia,José A. Garrido,Rosa Villa,Anton Guimerà‐Brunet,Maurizio Prato,Alejandro Criado,Elisabet Prats‐Alfonso
出处
期刊:ACS Sustainable Chemistry & Engineering
[American Chemical Society]
日期:2024-06-04
卷期号:12 (24): 9133-9143
标识
DOI:10.1021/acssuschemeng.4c01538
摘要
The persistence of photoresist residues from microfabrication procedures causes significant obstacles in the technological advancement of graphene-based electronic devices. These residues induce undesired chemical doping effects, diminish carrier mobility, and deteriorate the signal-to-noise ratio, making them critical in certain contexts, including sensing and electrical recording applications. In graphene solution-gated field-effect transistors (gSGFETs), the presence of polymer contaminants makes it difficult to perform precise electrical measurements, introducing response variability and calibration challenges. Given the absence of viable short to midterm alternatives to polymer-intensive microfabrication techniques, a postpatterning treatment involving THF and ethanol solvents was evaluated, with ethanol being the most effective, environmentally sustainable, and safe method for residue removal. Employing a comprehensive analysis with XPS, AFM, and Raman spectroscopy, together with electrical characterization, we investigated the influence of residual polymers on graphene surface properties and transistor functionality. Ethanol treatment exhibited a pronounced enhancement in gSGFET performance, as evidenced by a shift in the charge neutrality point and reduced dispersion. This systematic cleaning methodology holds the potential to improve the reproducibility and precision in the manufacturing of graphene devices. Particularly, by using ethanol for residue removal, we align our methodology with the principles of green chemistry, minimizing environmental impact while advancing diverse graphene technology applications.
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