The conformal-evaporated-film-by-rotation technique applied to the replication of surface structures (Conference Presentation)

The oblique angle deposition technique, based on directing a vapor flux towards a substrate with the trajectory of adatoms not parallel to the substrate normal, has been demonstrated as a method capable of generating nanostructured thin films. Sequential substrate movements can be used to shape the morphology of the thin films. The conformal-evaporated-film-by-rotation technique, which has evolved from the oblique angle deposition technique, was initially developed to fabricate high-fidelity replicas of biotemplates with features on the micron- and nanoscales distributed over a curved surface. This technique has been demonstrated to be effective in several fields ranging from photonics to forensics.