材料科学
纳米线
发光二极管
光电子学
压力传感器
电子皮肤
异质结
微电子机械系统
像素
纳米技术
光学
热力学
物理
作者
Yiyao Peng,Miaoling Que,Han Eol Lee,Rongrong Bao,Xiandi Wang,Junfeng Lu,Zuqing Yuan,Xiaoyi Li,Juan Tao,Junlu Sun,Junyi Zhai,Keon Jae Lee,Caofeng Pan
出处
期刊:Nano Energy
[Elsevier]
日期:2019-01-30
卷期号:58: 633-640
被引量:128
标识
DOI:10.1016/j.nanoen.2019.01.076
摘要
Simulating human tactile sensing through high-resolution electronics is a significant and challenging topic in artificial intelligence. A flexible p-GaN film/n-ZnO nanowire light-emitting diode (LED)-based pressure sensor array, with the merits of flexibility, high resolution, good transparency, fast response, stability, and lightweight, is fabricated through laser lift-off (LLO) process and hydrothermal growth of ZnO nanowires directly on a flexible GaN film, which is used for acquiring the two-dimensional (2D) pressure distribution mapping by reading the illumination intensities from all LED pixels parallelly. The intensity of each pixel composed by a GaN/ZnO nanowire heterostructure LED can be enhanced by the local compressive strain based on piezo-phototronic effect. A high spatial resolution of 2.6 μm and a fast response time of 180 ms were obtained, and also the sensor arrays can still function well after 4000 bending circles. The promising flexible LEDs-based pressure sensor array gains some technological innovations in the field of tactile sensing, with potential applications in smart skin, biomedicine, optical MEMS, and touchpad technology.
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