Kapton
材料科学
涂层
钝化
聚酰亚胺
制作
通量
化学气相沉积
图层(电子)
辐照
化学工程
分析化学(期刊)
纳米技术
化学
医学
替代医学
物理
病理
色谱法
核物理学
工程类
作者
Yi Li,Zhonghua Li,Detian Li,Yanchun He,Shengzhu Cao,Hu Wang,Hengjiao Gao,Hanjun HU,Ying He,Yuan Wang,Junwu Zhu
出处
期刊:Plasma Science & Technology
[IOP Publishing]
日期:2022-03-18
卷期号:24 (6): 065505-065505
被引量:9
标识
DOI:10.1088/2058-6272/ac5f38
摘要
Abstract One of the most widely used and well-established atomic oxygen (AO) protection solutions for low Earth orbit (LEO) satellites is the deposition of protective coatings on polymeric materials. However, manufacturing extensive expanses of these coating materials with good transparency, flexibility, smoothness, ultra-thinness, and exceptional AO resistance remains a critical issue. Herein, we successfully deposited a 400 nm thick polyorgansiloxane (SiO x C y H z ) coating with high optical transparency and uniform good adherence on to a 1.2 m wide polyimide surface, by optimizing the distribution of hexamethyldisiloxane and oxygen as precursors in the roll-to-roll compatible plasma-enhanced chemical vapor deposition process. After AO irradiation with the fluence of 7.9 × 10 20 atoms·cm –2 , the erosion yield of the SiO x C y H z -coated Kapton was less than 2.30 × 10 –26 cm 3 ·atom –1 , which was less than 0.77% of that of the Kapton. It indicates that the SiO x C y H z coating can well prevent the erosion of Kapton by AO. In addition, it was also clarified that a SiO 2 passivation layer was formed on the surface of the SiO x C y H z coating during AO irradiation, which exhibited a ‘self-reinforcing’ defense mechanism. The entire preparation process of the SiO x C y H z coating was highly efficient and low-cost, and it has shown great potential for applications in LEO.
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