材料科学
氮化物
氮化硅
氮化钛
纳米纤维
钛
表面改性
纳米技术
硅
冶金
化学工程
图层(电子)
工程类
作者
Н. І. Тищенко,V. G. Kolesnichenko,N. V. Dubovitskaya,P. M. Silenko,N. I. Danilenko,Ostap Zgalat-Lоzynskyy,V. N. Bulanov,A. V. Ragulya
标识
DOI:10.1007/s11106-010-9179-7
摘要
Silicon nitride nanofibers coated with titanium nitride particles are formed by deposition of TiO(OH)2 and Ti(O)2(OH)2 using controlled hydrolysis of TiCl4 followed by nitriding in an NH3 flow. The nitriding at 700–900°C permits the formation of 5 to 15 nm titanium nitride particles. The amorphous layer on Si3N4 fibers limits the nucleation of titanium nitride and thus the formation of continuous coatings. Titanium peroxyhydroxide Ti(O)2(OH)2 as a precursor is preferable for depositing titanium nitride coatings on silicon nitride fibers.
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