Section I Fundamentals Laser-Induced Damage Phenomena in Optics: A Historical Overview MJ Soileau Laser-Induced Damage by Thermal Effects Roger M Wood Defect-Induced Damage Semyon Papernov Self-Focusing and Nonlinear Effects Vitaly Gruzdev Femtosecond Laser-Induced Damage in Dielectric Materials Luke A Emmert and Wolfgang Rudolph Section II Measurements Measurement and Detection of Laser-Induced Damage Jianda Shao Statistics of Laser Damage Threshold Measurements Jonathan W Arenberg Measurement of Light Scattering, Transmittance, and Reflectance Sven Schroder and Angela Duparre Section III Materials, Surfaces, Thin Films, and Contamination Quartz and Glasses Laurent Lamaignere Crystalline Materials for UV Applications Christian Muhlig and Wolfgang Triebel Materials for Lasers: Frequency Conversion, Q-Switching, and Active Materials Anne Hildenbrand-Dhollande and Frank R Wagner Surface Manufacturing and Treatment Jerome Neauport and Philippe Cormont Introduction to Optical Coatings and Thin Film Production H Angus Macleod High-Power Coatings for NI R Lasers Christopher J Stolz Coatings for fs Lasers Marco Jupe and Detlev Ristau Spaceborne Applications Wolfgang Riede and Denny Wernham Sect ion IV Applications Lithography in the Deep Ultraviolet and Extreme Ultraviolet Klaus R Mann Free-Electron Lasers Michelle Shinn The High-Energy Petawatt Laser PHELIX and its High-Power Optics Stefan Borneis and Collaborators Index