Study of Waveguide Sizes for Silicon based Micro-ring Filters

With the explosive growth of information transmission, optical communication is highly prized for its advantages such as large bandwidth, low latency and high immunity to electromagnetic interference. In this context, it is important to investigate integrated low-cost, high-density photonic devices. In this paper, the effect of optical waveguide sizes on the micro-ring filtering effect is studied by designing an orthogonal experimental analysis method. Three influence factors were designed for this experiment, namely, the waveguide width, the height of the waveguide and the coupling spacing. Among them, each influence factor includes four sets of experimental data. Finally, based on the analysis of simulation results, the waveguide size of 360 nm*200 nm and the coupling pitch of 220 nm are determined. Simultaneously, the parameters of micro-ring performance are as follows: Q=1196.6, FWHM=1.31 nm, FSR=26.1 nm, and F=19.92. At the same time, during the analysis of simulation experiments, it was also found that when the length of Lc gradually increased in steps of 0.1 μm within the range of 0-2 μm, the phase of the output spectrum of the micro-loop filter would shift, with an offset of 6.1 nm. This phenomenon can achieve phase compensation when phase shift occurs due to process issues in the micro-ring fabrication process. The excellent performance of these parameters provides strong theoretical support for achieving efficient, low-cost, and high-density photonic devices.