Aerosol jet printing of surface acoustic wave microfluidic devices

洁净室 微流控 纳米技术 材料科学 声表面波 聚苯乙烯磺酸盐 光刻 制作 数字微流体 软光刻 纳米光刻 3D打印 实验室晶片 佩多:嘘 光电子学 电气工程 工程类 医学 替代医学 图层(电子) 病理 电润湿 电介质 复合材料
作者
Joseph Rich,Brian J. Cole,Teng Li,Bin Lu,Hanyu Fu,Barbara Herrnstein Smith,Jianping Xia,Shujie Yang,Ruoyu Zhong,James L. Doherty,Kanji Kaneko,Hiroaki Suzuki,Zhenhua Tian,Aaron D. Franklin,Tony Jun Huang
出处
期刊:Microsystems & Nanoengineering [Springer Nature]
卷期号:10 (1)
标识
DOI:10.1038/s41378-023-00606-z
摘要

Abstract The addition of surface acoustic wave (SAW) technologies to microfluidics has greatly advanced lab-on-a-chip applications due to their unique and powerful attributes, including high-precision manipulation, versatility, integrability, biocompatibility, contactless nature, and rapid actuation. However, the development of SAW microfluidic devices is limited by complex and time-consuming micro/nanofabrication techniques and access to cleanroom facilities for multistep photolithography and vacuum-based processing. To simplify the fabrication of SAW microfluidic devices with customizable dimensions and functions, we utilized the additive manufacturing technique of aerosol jet printing. We successfully fabricated customized SAW microfluidic devices of varying materials, including silver nanowires, graphene, and poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS). To characterize and compare the acoustic actuation performance of these aerosol jet printed SAW microfluidic devices with their cleanroom-fabricated counterparts, the wave displacements and resonant frequencies of the different fabricated devices were directly measured through scanning laser Doppler vibrometry. Finally, to exhibit the capability of the aerosol jet printed devices for lab-on-a-chip applications, we successfully conducted acoustic streaming and particle concentration experiments. Overall, we demonstrated a novel solution-based, direct-write, single-step, cleanroom-free additive manufacturing technique to rapidly develop SAW microfluidic devices that shows viability for applications in the fields of biology, chemistry, engineering, and medicine.
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