Analysis of subsurface damage inhibition in magnetization-enhanced force-rheological polishing

Subsurface damage (SSD) during polishing silicon carbide (SiC) is an unavoidable problem in mould production. However, studies on the law of SSD generation in the magnetisation-enhanced force-rheological polishing process are limited. An SSD depth prediction model is established considering factors such as strain rate effect, elastic-plastic deformation, and dynamic changes in mechanical properties. A detection technology for the SSD depth of aspheric mould was proposed, and the influence mechanism of orthogonal tests on the SSD state of SiC mould was studied. The results show that the maximum deviation between the calculated and experimental results is less than 7%. The SSD depth dropped to the minimum threshold (< 0.5 µm) under a specific combination of parameters.