材料科学
退火(玻璃)
静态随机存取存储器
单层
合金
磁阻随机存取存储器
兴奋剂
随机存取存储器
光电子学
扭矩
凝聚态物理
电阻率和电导率
冶金
复合材料
纳米技术
电子工程
电气工程
计算机科学
物理
计算机硬件
工程类
热力学
作者
Ward Janssens,R. Carpenter,Van Dai Nguyen,Kaiming Cai,Marta Agati,Paola Favia,Jo DeBoeck,Kurt Wostyn,Sébastien Couet,Giacomo Talmelli
标识
DOI:10.1088/1361-6463/ad9ebc
摘要
Abstract Spin-orbit torque magnetoresisitive random-access memory (SOT-MRAM) is a promising candidate as a non-volatile SRAM replacement. However, one of the biggest challenges that limits the SOT-MRAM application, is the relatively high current that is needed to switch the free layer. Pt is a promising SOT track material due to its low resistivity and compatibility with back end of line (BEOL) processes, though it has relatively low SOT-efficiency. A possible route to increase the SOT-efficiency of Pt is to dope it with another material. In this work, a comparative study is conducted between Pt with sub-monolayer insertions and Pt-alloys, referred to as PtX. The structural differences between them lead to a different SOT-efficiency trend with respect to the content of the PtX layer. It is shown that in the Pt/X-insertions, a small SOT-efficiency increase is obtained up to five sub-monolayer insertions and is relatively independent of the material X. On the other hand, the SOT-efficiencies in Pt-alloys are highly dependent on the material X. Compared to pure Pt, our results show that the SOT-efficiency of PtCu-alloys increases up to about three times, whereas PtCr-alloys show no significant enhancement. Furthermore, PtCu is promising route towards BEOL compatible SOT-MRAMs, since it is shown that it can maintain the perpendicular magnetic anisotropy (PMA) of 1 nm Co after 400°C annealing.
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