硅
材料科学
还原(数学)
能源消耗
多晶硅
沉积(地质)
工程物理
光电子学
核工程
电气工程
复合材料
工程类
几何学
数学
古生物学
图层(电子)
沉积物
生物
薄膜晶体管
摘要
With the guidance and support of the policy, the market demand for solar photovoltaic panels will continue to expand. To reduce the energy consumption of polysilicon reduction furnace and improve the quality, a numerical model of a 24-pair silicon rod polycrystalline silicon reduction furnace is constructed in the present study, and the coupling calculation of convection and radiation is carried out by using the SST K-ω model and the DO radiation model. The flow field and temperature field in the reduction furnace affected by various process parameters are discussed to explore the mechanism of action. The results show that the deposition rate of polysilicon increases with the increase of feed gas inlet velocity, the increase of operating pressure and the decrease of H2 ratio.
科研通智能强力驱动
Strongly Powered by AbleSci AI