微电子
微电极
多电极阵列
水质
氯
钝化
臭氧
砷
材料科学
环境科学
化学
电极
纳米技术
冶金
生态学
有机化学
物理化学
图层(电子)
生物
作者
J. Gobet,Ph. Rychen,F. Cardot,Eduardo Santoli
标识
DOI:10.2166/wst.2003.0102
摘要
A versatile microelectrode array sensor for water quality monitoring has been developed. The array fabrication, based on batch microelectronic processes, results in a highly stable passivation of the silicon chip surface and provides the possibility to use a backside contact. Packaging was optimized for on-line water operation at high pressures. Examples of applications include chlorine monitoring in drinking water, ozone monitoring in deionized water, dissolved oxygen in activated sludge and preliminary measurements of trace arsenic.
科研通智能强力驱动
Strongly Powered by AbleSci AI