导纳
灵敏度(控制系统)
计算机科学
标准差
过程(计算)
光学
材料科学
算法
电子工程
数学
物理
统计
工程类
量子力学
操作系统
电阻抗
作者
Francisco Villa-Villa,Jorge Gaspar-Armenta
标识
DOI:10.1117/1.oe.57.10.105103
摘要
We present a general analysis of thickness errors in multilayers using the classical existing methods, and adding a complimentary tool based on admittance perturbed circumferences that allow us to obtain a deeper insight into the spectral performance sensitivity due to each layer composing the system. An analysis of the standard deviation of reflectance based on perturbing the system with statistical thickness errors is considered. The proposed method represents a useful tool to study the sensitivity of any multilayer to determine the manufacturing feasibility in the design stage that can save a number of trial deposition experiments while setting up the manufacturing process of a given system. This fact is demonstrated by considering different classical systems with highly stable and instable spectral regions.
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