Characteristics of Mg doped TiO2 thin film based deep UV photodetector

Co-doping of Mg into chemically stable TiO2 thin film is attractive for deep UV detection. In this report, we have fabricated ∼110 nm undoped TiO2 thin film and Mg doped TiO2 thin film based photodetectors on p-type Silicone substrates. The Mg doped TiO2 thin film shows good hydrophobicity. The undoped TiO2 thin film shows low deep UV besides high responsivity in the visible region. The Mg:TiO2 photodetector shows a maximum of four times superior light sensitivity as compared to undoped TiO2 thin film at 200 nm illumination. The Mg:TiO2 thin film shows the countable temporal response at 290 nm but the detector possesses low responsivity in the visible region.