NMOS逻辑
材料科学
二硫化钼
晶体管
薄脆饼
电子线路
半导体
场效应晶体管
集成电路
数码产品
纳米技术
光电子学
电子工程
电气工程
电压
工程类
冶金
作者
Xinyu Wang,Xinyu Chen,Jingyi Ma,Saifei Gou,Xiaojiao Guo,Ling Tong,Junqiang Zhu,Yin Xia,Die Wang,Chuming Sheng,Honglei Chen,Zhengzong Sun,Shunli Ma,Antoine Riaud,Zihan Xu,Chunxiao Cong,Zhijun Qiu,Peng Zhou,Yufeng Xie,Lifeng Bian,Wenzhong Bao
标识
DOI:10.1002/adma.202202472
摘要
2D semiconductors, such as molybdenum disulfide (MoS2 ), have attracted tremendous attention in constructing advanced monolithic integrated circuits (ICs) for future flexible and energy-efficient electronics. However, the development of large-scale ICs based on 2D materials is still in its early stage, mainly due to the non-uniformity of the individual devices and little investigation of device and circuit-level optimization. Herein, a 4-inch high-quality monolayer MoS2 film is successfully synthesized, which is then used to fabricate top-gated (TG) MoS2 field-effect transistors with wafer-scale uniformity. Some basic circuits such as static random access memory and ring oscillators are examined. A pass-transistor logic configuration based on pseudo-NMOS is then employed to design more complex MoS2 logic circuits, which are successfully fabricated with proper logic functions tested. These preliminary integration efforts show the promising potential of wafer-scale 2D semiconductors for application in complex ICs.
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