光刻胶
纳米棒
材料科学
平版印刷术
X射线光刻
纳米技术
光电子学
双光子激发显微术
光学
抵抗
荧光
图层(电子)
物理
作者
Saulius Juodkazis,Vygantas Mizeikis,Kock Khuen Seet,Masafumi Miwa,Hiroaki Misawa
出处
期刊:Nanotechnology
[IOP Publishing]
日期:2005-06-01
卷期号:16 (6): 846-849
被引量:259
标识
DOI:10.1088/0957-4484/16/6/039
摘要
Studies on two-photon lithography in negative SU-8 photoresist demonstrate the possibility of obtaining mechanically stable, stress-free, extended nanorods having lateral sizes of about 30 nm (corresponding to λ/25 resolution). The high resolution achievable with the given combination of materials and fabrication techniques demonstrates its potential for the fabrication of large-scale nanostructures, such as photonic crystals with photonic stop gaps at visible wavelengths.
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