栅栏
光学
闪耀光栅
材料科学
全息光栅
电子束光刻
衍射效率
压花
平版印刷术
波导管
衍射光栅
光电子学
纳米压印光刻
抵抗
物理
制作
图层(电子)
病理
复合材料
冶金
医学
替代医学
作者
R. Waldhäusl,Bernd Schnabel,Peter Dannberg,Ernst‐Bernhard Kley,Andreas Bräuer,W. Karthe
出处
期刊:Applied optics
[The Optical Society]
日期:1997-12-20
卷期号:36 (36): 9383-9383
被引量:153
摘要
Investigations of highly efficient grating couplers for polymer slab and strip waveguides fabricated by electron-beam lithography are reported. A maximum input efficiency of 67% is achieved. The electron-beam direct-writing technique allows one to replicate the original gratings into polymer substrates by embossing. An all-polymeric optical chip with efficient grating couplers is demonstrated. Waveguide grating couplers with blazed profile and variable grating depth are investigated. Thus, the intensity distribution of the outcoupled light is matched to a Gaussian-like profile. A focusing blazed grating that couples the light with an efficiency of 42% into a polymer strip waveguide is reported. A curvature correction of the grating lines allows one to improve the focusing properties.
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