光电探测器
响应度
光电子学
材料科学
光子学
硅光子学
电子线路
应变工程
硅
红外线的
锗
光学
物理
电气工程
工程类
作者
Jürgen Michel,Jifeng Liu,Lionel C. Kimerling
出处
期刊:Nature Photonics
[Springer Nature]
日期:2010-07-30
卷期号:4 (8): 527-534
被引量:1257
标识
DOI:10.1038/nphoton.2010.157
摘要
The past decade has seen rapid progress in research into high-performance Ge-on-Si photodetectors. Owing to their excellent optoelectronic properties, which include high responsivity from visible to near-infrared wavelengths, high bandwidths and compatibility with silicon complementary metal–oxide–semiconductor circuits, these devices can be monolithically integrated with silicon-based read-out circuits for applications such as high-performance photonic data links and infrared imaging at low cost and low power consumption. This Review summarizes the major developments in Ge-on-Si photodetectors, including epitaxial growth and strain engineering, free-space and waveguide-integrated devices, as well as recent progress in Ge-on-Si avalanche photodetectors. Owing to their excellent optoelectronic properties, Ge-on-Si photodetector can be monolithically integrated with silicon-based read-out circuits for applications such as high-performance photonic data links and low-cost infrared imaging at low power consumption. This Review covers the major developments in Ge-on-Si photodetectors, including epitaxial growth and strain engineering, free-space and waveguide-integrated devices, as well as recent progress in Ge-on-Si avalanche photodetectors.
科研通智能强力驱动
Strongly Powered by AbleSci AI