Experimental assessment of gate-induced drain leakage in SOI stacked nanowire and nanosheet nMOSFETs at high temperatures

This paper presents an experimental assessment of gate-induced drain leakage (GIDL) in stacked nanowire and nanosheet transistors for different temperatures of operation, in the temperature range between 300 K and 580 K. The temperature rise increases the GIDL current and its dependence on the device width due to the increase of band-to-band generation with temperature and weakening of electrostatic coupling.