作者
Shuyi Wang,Xiaopan Song,Jun Xu,Junzhuan Wang,Linwei Yu
摘要
Silicon (Si) is currently the most mature and reliable semiconductor material in the industry, playing a pivotal role in the development of modern microelectronics, renewable energy, and bio-electronic technologies. In recent years, widespread research attention has been devoted to the development of advanced flexible electronics, photovoltaics, and bio-interfaced sensors/detectors, boosting their emerging applications in distributed energy sources, healthcare, environmental monitoring, and brain-computer interfaces (BCIs). Despite the rigid and brittle nature of Si, a series of new fabrication technologies and integration strategies have been developed to enable a wide range of c-Si-based high-performance flexible photovoltaics and electronics, which were previously only achievable with intrinsically soft organic and polymer semiconductors. More interestingly, programmable geometric engineering of crystalline silicon (c-Si) units and logic circuits has been explored to enable the fabrication of various highly flexible nanoprobes for intracellular sensing and the deployment of soft BCI matrices to record and understand brain neural activities for the development of advanced neuroprosthetics. This review will systematically examine the latest progress in the fabrication of Si-based flexible solar cells, photodetectors, and biological probing interfaces over the past decade, identifying key design principles, mechanisms, and technological milestones achieved through novel geometry, morphology, and composition control. These advancements, when combined, will not only promote the practical applications of sustainable energy and wearable electronics but also spur new breakthroughs in emerging human-machine interfaces (HMIs) and artificial intelligence applications, which hold significant implications for understanding neural activities, implementing more efficient artificial Intelligence (AI) algorithms, and developing new therapies or treatments. Finally, we will summarize and provide an outlook on the current challenges and future opportunities of Si-based electronics, flexible optoelectronics, and bio-sensing.