材料科学
电容感应
聚二甲基硅氧烷
电介质
压力传感器
光电子学
激光烧蚀
纳米技术
制作
激光器
计算机科学
光学
机械工程
医学
物理
替代医学
病理
工程类
操作系统
作者
Yibin Zhao,Jingyu Zhou,Chenkai Jiang,Tianlong Xu,Kaixin Li,Dawei Zhang,Bin Sheng
出处
期刊:Polymers
[MDPI AG]
日期:2024-08-21
卷期号:16 (16): 2369-2369
标识
DOI:10.3390/polym16162369
摘要
Flexible, wearable pressure sensors offer numerous benefits, including superior sensing capabilities, a lightweight and compact design, and exceptional conformal properties, making them highly sought after in various applications including medical monitoring, human–computer interactions, and electronic skins. Because of their excellent characteristics, such as simple fabrication, low power consumption, and short response time, capacitive pressure sensors have received widespread attention. As a flexible polymer material, polydimethylsiloxane (PDMS) is widely used in the preparation of dielectric layers for capacitive pressure sensors. The Young’s modulus of the flexible polymer can be effectively decreased through the synergistic application of sacrificial template and laser ablation techniques, thereby improving the functionality of capacitive pressure sensors. In this study, a novel sensor was introduced. Its dielectric layer was developed through a series of processes, including the use of a sacrificial template method using NaCl microparticles and subsequent CO2 laser ablation. This porous PDMS dielectric layer, featuring an array of holes, was then sandwiched between two flexible electrodes to create a capacitive pressure sensor. The sensor demonstrates a sensitivity of 0.694 kPa−1 within the pressure range of 0–1 kPa and can effectively detect pressures ranging from 3 Pa to 200 kPa. The sensor demonstrates stability for up to 500 cycles, with a rapid response time of 96 ms and a recovery time of 118 ms, coupled with a low hysteresis of 6.8%. Furthermore, our testing indicates that the sensor possesses limitless potential for use in detecting human physiological activities and delivering signals.
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