期刊:IEEE Sensors Journal [Institute of Electrical and Electronics Engineers] 日期:2007-12-01卷期号:7 (12): 1759-1766被引量:37
标识
DOI:10.1109/jsen.2007.910070
摘要
A unique optical accelerometer based on a microring resonator fabricated on a flexible substrate is experimentally demonstrated and its performance analyzed. This accelerometer measures the applied acceleration by measuring the shift of the resonant wavelength of the flexible microring resonator. The measured sensitivity of 31 pm/g is in accordance with our calculations. Some schemes of tailoring the sensitivity and the dynamic range are also suggested.