Ion Beam Figuring of Strongly Curved Surfaces with a (X, Y, Z) Linear Three-Axes System
计算
离子
光学
物理
几何学
数学
量子力学
作者
Thomas Haensel,Andreas Nickel,Axel Schindler
标识
DOI：10.1364/oft.2008.jwd6
摘要
Ion beam figuring of strongly curved surfaces using small spot beam and a three linear axes motion system and taking the ion incidence etch rate dependence into account in the process modeling has been developed.
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(2025-6-4)
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