On-chip short-wave infrared multispectral detector based on integrated Fabry–Perot microcavities array

We demonstrate an ultra-compact short-wave infrared (SWIR) multispectral detector chip by monolithically integrating the narrowband Fabry–Perot microcavities array with the InGaAs detector focal plane array. A 16-channel SWIR multispectral detector has been fabricated for demonstration. Sixteen different narrowband response spectra are acquired on a 64×64 pixels detector chip by four times combinatorial etching processes. The peak of the response spectra varies from 1450 to 1666 nm with full width at half-maximum of 24 nm on average. The size of the SWIR multispectral detection system is remarkably reduced to a 2 mm2 detector chip.