Preparation of CuI films on NaCl single crystals by reactive sputtering and characterization by electron microscopy and Rutherford backscattering

The structure and composition of reactively sputtered CuIx films have been investigated by electron diffraction and Rutherford ion backscattering. It has been found that under favorable conditions single-crystal films of CuI in the γ-structure are deposited. These films have a composition ratio Cu/I of approximately one.