材料科学
X射线光电子能谱
纳米复合材料
透射电子显微镜
薄膜
溅射沉积
溅射
基质(水族馆)
粒度
衍射
复合数
分析化学(期刊)
化学工程
光电子学
纳米技术
复合材料
光学
化学
海洋学
物理
地质学
工程类
色谱法
作者
Amita Goyal,Abdul K. Rumaiz,Yanming Miao,Sukti Hazra,Chaoying Ni,S. İsmat Shah
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2008-07-01
卷期号:26 (4): 1315-1320
被引量:11
摘要
Thin films of TiO2–Ge nanocomposites were deposited by rf magnetron sputtering from a composite target prepared by pressing a mixture of TiO2 and Ge powders with a ratio 2:1. Thin films were deposited at various rf powers and temperatures and characterized by using x-ray diffraction, x-ray photoelectron spectroscopy, and transmission electron microscopy (TEM). The analyses showed that the film composition changes with the target rf power and substrate temperature with rf power being a bigger contributor to the change. TEM analyses of films revealed that segregated Ge nanograins were formed and were dispersed within the TiO2 matrix. The average grain size of Ge nanograins was between 9 and 15nm.
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