Novel Method for Detection of Organic Additives in Copper Plating Baths

线性扫描伏安法 剥离(纤维) 循环伏安法 阳极溶出伏安法 电镀(地质) 伏安法 电化学 材料科学 电极 镀铜 吸附溶出伏安法 微分脉冲伏安法 电镀 有机化合物 化学 分析化学(期刊) 纳米技术 色谱法 复合材料 冶金 有机化学 物理化学 地质学 图层(电子) 地球物理学
作者
Jhih‐Jie Huang,Yu–Ching Weng
出处
期刊:Meeting abstracts 卷期号:MA2020-01 (52): 2881-2881
标识
DOI:10.1149/ma2020-01522881mtgabs
摘要

Appropriate organic additives, including accelerators, inhibitors and leveling additives, are essential in the copper plating process of printed circuit boards to achieve defect-free filling effect. The fluctuation of organic additives would cause product defects and reduce manufacturing efficiency resulting in increasing additional cost. Therefore, it is very important to control the quality of electroplating. Development of sensors that detect the concentration of organic additives is indispensable. At present, the concentration of organic additives can only be measured by offline sampling in industry. An indirect cyclic voltammetry stripping (CVS) are often used to detect the concentration of organic additives based on the stripping peak of copper. This study attempts to measure the organic additives directly at high applied potential by using three different electrochemical methods, including linear sweep voltammetry (LSV), differential pulse voltammetry (DPV) and square wave voltammetry (SWV). The results show that the response current values of the three electrochemical methods have a good linear relationship with the concentration of the organic additives. The sensitivity of the electrode by LSV is the highest. There are two proper potentials to detect the additives by SWV. However, the detection potentials of the three organic additives are quite close. If these organic additives should be accurately identified separately, the electrode would need to be further modified.

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