平行性(语法)
数据并行性
平坦度(宇宙学)
计算机科学
任务并行性
隐式并行
航空航天
指令级并行
并行计算
刚度(电磁)
材料科学
物理
工程类
航空航天工程
复合材料
量子力学
宇宙学
作者
Juntao Zhang,Bo Pan,Huan Liu,Xu Zhu,Renke Kang,Dongxing Du,Jiang Guo
出处
期刊:Applied Optics
[The Optical Society]
日期:2022-05-10
卷期号:61 (17): 4993-4993
被引量:1
摘要
Nontransparent flat parts with weak rigidity are widely used in precision physics experiments, aerospace, and other fields in which parallelism is required. However, existing methods cannot meet requirements due to the limitation of measurement size and accuracy. This paper proposes a new method for measuring parallelism of nontransparent flat parts with high accuracy and then builds a submicrometer-level parallelism measuring system. The 3D model of the whole part is reconstructed by thickness and flatness, which are measured respectively. Subsequently, parallelism is evaluated by the principle of minimum directional zone. The method is verified by an experiment with a thin copper substrate sized ⊘200mm×2.48mm on the parallelism measuring system. The experiment result shows that the part's parallelism is 7.41 µm, and the expanded uncertainty of parallelism measurement system is 0.34 µm, k=2.
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