等离子体增强化学气相沉积
化学气相沉积
拉曼光谱
基质(水族馆)
材料科学
扫描电子显微镜
光谱学
分析化学(期刊)
碳纤维
化学工程
沉积(地质)
透射率
化学
纳米技术
复合数
复合材料
光电子学
光学
有机化学
沉积物
古生物学
工程类
地质学
物理
海洋学
生物
量子力学
作者
Sung Yun Kim,Yeun Ho Joung,Won Seok Choi
标识
DOI:10.7567/jjap.53.05fd09
摘要
In this study, we investigated the low-temperature growth process of carbon nanowalls (CNWs). A microwave plasma-enhanced chemical vapor deposition (PECVD) system was used to grow CNWs on Si and glass substrates using methane (CH4) and hydrogen (H2) gases. CNWs were synthesized at a substrate temperature of 500 °C, and their growth properties depending on their growth time were examined. The vertical and surficial conditions of the grown CNWs depending on the growth temperature were characterized via field-emission scanning electron microscopy (FE-SEM), and the Raman spectroscopy measurements showed structural variations. The optical properties of the CNWs that were synthesized on the glass substrate were analyzed using UV–vis spectroscopy, and it was found that the light transmittance was affected by the form and shape of the CNWs. Energy dispersive spectroscopy (EDS) showed that the CNWs consisted solely of carbon.
科研通智能强力驱动
Strongly Powered by AbleSci AI