Impact of texture-enhanced transmission on high-efficiency surface-textured light-emitting diodes

The transmission properties of semiconductor surfaces can be changed by surface texturing. We investigate these changes experimentally and find that an enhancement of the angle-averaged transmission by a factor of 2 can be achieved with optimum texturing parameters. This enhanced transmission provides an additional light extraction mechanism for high-efficiency surface-textured light-emitting diodes. External quantum efficiencies of 46% and 54% are demonstrated before and after encapsulation, respectively.