材料科学
无定形固体
微观结构
外延
弹性模量
图层(电子)
复合材料
结晶
制作
溅射沉积
模数
表征(材料科学)
薄膜
溅射
纳米技术
结晶学
化学工程
化学
病理
工程类
医学
替代医学
作者
Wei Li,Jia Meng,Ping Liu,Hao-ming Du,Ke Zhang,Fengcang Ma,Xinkuan Liu,Xiaohong Chen
出处
期刊:Vacuum
[Elsevier]
日期:2016-04-06
卷期号:128: 230-233
被引量:8
标识
DOI:10.1016/j.vacuum.2016.04.002
摘要
A series of HfC/SiC nanomultilayered films with different SiC layer thickness were synthesized by reactive magnetron sputtering. The effect of SiC layer thickness on the microstructure and mechanical properties of HfC/SiC nanomultilayered films were studied. When SiC layer thickness was less than 0.9 nm, originally amorphous SiC layers were forced to crystallize and grow epitaxially with HfC layers, resulting in the improvement of crystallization integrality and enhancement in hardness and elastic modulus. The maximum hardness and elastic modulus could reach 36.2 GPa and 419 GPa, respectively. With further increase of SiC layer thickness, SiC layers changed back to amorphous state and damaged the epitaxial growth structure, leading to deterioration of mechanical properties.
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