For embedded high resolution successive approximation ADCs, it is necessary to determine the performance limitation of the CMOS process used for the design. This paper presents a modelling technique for major limitations, i.e. capacitor mismatch and non-linearity effects. The model is besed on Monte Carlo simulations applied to an analytical description of the ADC. Additional effects like charge injection and parasitic capacitance are included. The analytical basis covers different architectures with a fully binary weighted or series-split capacitor array. when comparing our analysis and measurement results to several conventional approaches, a significantly more realistic estimation of the attainable resolution is achieved. The presented results provide guidance in choosing process and circuit structure for the design of SAR ADCs. The model also enbles reliable capacitor sizing early in the design process, i.e. well before actual layout implementation.