微等离子体
雪崩光电二极管
光电子学
光电流
击穿电压
暗电流
紫外线
材料科学
雪崩二极管
雪崩击穿
APDS
光探测
汤森排放
光电二极管
光电效应
光电探测器
单光子雪崩二极管
电压
光学
化学
等离子体
物理
探测器
电离
离子
有机化学
量子力学
作者
J. X. Cao,Qing Cai,Haifan You,Pengfei Shao,Jin Wang,Hui Guo,Junjun Xue,Bin Liu,Zili Xie,Xun Cao,Hai Lu,Youdou Zheng,Rong Zhang,Dunjun Chen
摘要
Amplification of weak ultraviolet signals has always been a challenging issue to design and fabricate high-performance ultraviolet photodetectors. Here, we observe a distinctive microplasma breakdown behavior in AlGaN-based ultraviolet avalanche photodiodes with artificial mesa architecture. At 107 V breakdown voltage, the photocurrent increases sharply whereas dark current intriguingly remains at the extremely low level of 0.1 nA as the applied voltage increases. Simultaneously, a significant blue luminescence phenomenon is observed at the mesa edge of photodiode at breakdown voltage, indicating the occurrence of microplasma breakdown. Ultimately, the microplasma avalanche photodiode achieves a record-high avalanche gain of 3 × 106 with light–dark current ratio readily exceeding 107. Kelvin probe force microscopy was employed to reveal the physical mechanism of localized avalanche breakdown induced by photoelectric effects and elaborate the microplasma discharge process, which is related to surface states. The unprecedented detection mode of photocurrent triggering avalanche events while remaining low dark current is anticipated to effectively shield the background noise and amplify ultraviolet signals. It is worth further research to explore its possibility on high-sensitivity ultraviolet photodetection.
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