平版印刷术
激发态
Atom(片上系统)
节点(物理)
驻波
计算光刻
光刻
物理
领域(数学)
极紫外光刻
无光罩微影
下一代光刻
原子物理学
材料科学
X射线光刻
分辨率(逻辑)
光学
抵抗
电子束光刻
纳米技术
量子力学
计算机科学
图层(电子)
嵌入式系统
纯数学
人工智能
数学
作者
Mingdong Liu,Hai-Hua Wang,Lei Wang,Jingming Fan,Jia Liu,Yong Zhang,Yiming Xu,Aijun Li
出处
期刊:Physica Scripta
[IOP Publishing]
日期:2023-08-23
卷期号:98 (10): 105402-105402
标识
DOI:10.1088/1402-4896/acf34e
摘要
Abstract We theoretically propose a scheme that utilizes the excited state of a Λ-type three-level atom system for atom lithography. A standing-wave coupling field and a probe field provide localized probability distribution of the excited atoms. Unlike the previous studies in atom localization, we focus on splitting the single-peak structure localized on the node of the standing-wave field to a double-peak structure. The shift distance of double-peak related to the parameters of external laser fields is investigated. The period of lithography pattern could reach λ /4, while the resolution of lithography is promising to be smaller than 0.02 λ by adjusting system parameters. This scheme can be extended to form a two-dimensional pattern for lithography.
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