材料科学
无定形固体
折射率
分析化学(期刊)
结晶学
光电子学
化学
有机化学
作者
M. Molina-Ruiz,Khemraj Shukla,A. Ananyeva,G. Vajente,M. R. Abernathy,Thomas Metcalf,Xiao Liu,A.S. Markosyan,R. Bassiri,M. M. Fejer,Mariana Fazio,L. Yang,Carmen S. Menoni,F. Hellman
出处
期刊:Physical Review Materials
[American Physical Society]
日期:2024-03-06
卷期号:8 (3)
标识
DOI:10.1103/physrevmaterials.8.035603
摘要
The ability to observe astronomical events through the detection of gravitational waves relies on the quality of multilayer coatings used on the optical mirrors of interferometers. Amorphous ${\mathrm{Ta}}_{2}{\mathrm{O}}_{5}$ (including ${\mathrm{TiO}}_{2}:{\mathrm{Ta}}_{2}{\mathrm{O}}_{5}$) currently limits detector sensitivity due to high mechanical loss. In this paper, mechanical loss measured at both cryogenic and room temperatures of amorphous ${\mathrm{Ta}}_{2}{\mathrm{O}}_{5}$ films grown by magnetron sputtering and annealed in air at 500 ${}^{\ensuremath{\circ}}\mathrm{C}$ is shown to decrease for elevated growth temperature. Films grown at 310 ${}^{\ensuremath{\circ}}\mathrm{C}$ and annealed yield a mechanical loss of $3.1\ifmmode\times\else\texttimes\fi{}{10}^{\ensuremath{-}4}$ at room temperature, the lowest value reported for pure amorphous ${\mathrm{Ta}}_{2}{\mathrm{O}}_{5}$ grown by magnetron sputtering to date, and comparable to the lowest values obtained for films grown by ion beam sputtering. Additionally, the refractive index $n$ increases 6% for elevated growth temperature, which could lead to improved sensitivity of gravitational-wave detectors by allowing a thickness reduction in the mirrors' coatings. Structural characterization suggests that the observed mechanical loss reduction in amorphous ${\mathrm{Ta}}_{2}{\mathrm{O}}_{5}$ films with increasing growth temperature correlates with a reduction in the coordination number between oxygen and tantalum atoms, consistent with ${\mathrm{TaO}}_{\text{x}}$ polyhedra with increased corner-sharing and reduced edge- and face-sharing structures.
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