High-mobility, sputtered films of indium oxide doped with molybdenum

Thin films of molybdenum-doped indium oxide, an n-type transparent conducting oxide, were deposited on glass substrates by a large-area deposition technique, radio-frequency magnetron sputtering, and their electrical properties were examined. Molybdenum content was varied from 1 to 4 wt%, and the highest mobility achieved was 83 cm2 V−1 s−1 at a carrier concentration of 3.0×1020 cm−3 without any postdeposition treatment for one of the films made from the target with 2 wt% Mo. Temperature-dependent Hall analysis indicated that this high mobility is limited by phonon scattering, whereas the method of four coefficients analysis showed that the conduction band is parabolic.