加速度计
微电子机械系统
导电体
对流
有限元法
声学
材料科学
电子工程
机械
电气工程
计算机科学
工程类
结构工程
光电子学
物理
操作系统
作者
A. Rekik,Brahim Mezghani,Florence Azaïs,Norbert Dumas,Mohamed Masmoudi,F. Mailly,Pascal Nouet
摘要
This paper presents an investigation on the effect of geometrical dimensions on the conductive behaviour of a CMOS MEMS convective accelerometer. Numerous FEM simulations are conducted to prove the validity of a previously developed model. This model was firstly developed to represent the effect of only one geometrical parameter; the etched cavity depth. We prove here that this model may represent also the effect of other geometrical parameters, the cavity half-width and the package height, on the conductive behaviour of the sensor.
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