2D/3D cohesive zone modeling of Xiao's mixed-mode delamination experiment (2012) is performed. In particular the suitability of ANSYS cohesive elements CONTA171/173 for delamination modeling of EMC-CU interfaces is tested. For a Mixed Mode Delamination test with narrow samples, a comparison of the 2D/3D simulation results and the experimental data shows that 2D modeling is appropriate if a plane stress approximation is chosen. The position of the current crack length is found near the end of the active zone of the cohesive elements.