材料科学
光电子学
击穿电压
肖特基二极管
宽禁带半导体
氮化镓
晶体管
二极管
功率半导体器件
肖特基势垒
外延
基质(水族馆)
图层(电子)
电接点
电压
电气工程
纳米技术
工程类
地质学
海洋学
作者
Daisuke Sugiyama,Ryo Kajitani,Hiroyuki Handa,Nanako Shiozaki,Shinji Ujita,Masahiro Ogawa,Kenichiro Tanaka,Satoshi Tamura,Tetsuo Hatsuda,Masahiro Ishida,Tetsuzo Ueda
摘要
We propose a normally-off vertical GaN-based transistor on a bulk GaN substrate with low specific on-state resistance of 1.0 mΩ·cm2 and high off-state breakdown voltage of 1.7 kV. P-GaN/AlGaN/GaN triple layers are epitaxially regrown over V-shaped grooves formed over the drift layer. The channel utilizes so-called semi-polar face with reduced sheet carrier concentration at the AlGaN/GaN interface, which enables high threshold voltage of 2.5 V and stable switching operations. The employed p-type gate does not give any concern of the gate instability. Note that formation of carbon doped insulating GaN layer formed on p-GaN well layer underneath the channel suppresses the punch-through current at off-state between the source and drain, which enables good off-state characteristics. The fabricated high-current vertical transistor achieves successful fast switching at 400V/15A. We also propose a novel vertical GaN-based junction barrier Schottky (JBS) diode with trenched p-GaN region on a bulk GaN substrate. A specific differential on-resistance of the GaN JBS diode is 0.9 mΩ·cm2 while keeping high breakdown voltage of 1.6 kV. These results indicate that the demonstrated vertical GaN devices are very promising for future high power switching applications.
科研通智能强力驱动
Strongly Powered by AbleSci AI