Total Near Interface Trap Density Calculation of 4H-SiC/SiO<sub>2</sub> Structures before and after Nitrogen Passivation

We compare the effect of hydrogen, nitrogen, and phosphorous passivation on total near interface trap density and mobility of 4H(0001)-SiC/SiO2 structure. The results show that nitrogen and phosphorous passivation decrease total near interface trap density by pushing the energy levels of interface traps away from the conduction band. The density of states (DOS), including interface states (Dit), are calculated for several 4H(0001)-SiC/SiO2 structures using density functional theory (DFT).