Unraveling the composition of each atomic layer in the MXene/MAX phase structure – identification of oxycarbides, oxynitrides, and oxycarbonitrides subfamilies of MXenes

SIMS profiling with atomic depth resolution enables qualitative characterization of MAX phase/MXene samples. With the deconvolution and calibration protocol, it is possible to quantify the composition of each atomic layer with 1% accuracy.