纳米柱
反应离子刻蚀
蚀刻(微加工)
平版印刷术
纳米球光刻
材料科学
光子学
光子晶体
结构着色
纳米技术
等离子体刻蚀
基质(水族馆)
光电子学
纳米结构
制作
图层(电子)
病理
地质学
替代医学
海洋学
医学
作者
Chun-Li Luo,Lin-Xin Zheng,Jun-Yi Jiao,Guowei Lü,Dongzhou Zhong,Weiguo Yan
标识
DOI:10.1016/j.optmat.2022.113273
摘要
Structural color due to unique optical response are of much interest both for their fundamental properties and applications in photonic integrate circuits, optical biomaterials and camouflage. Nanosphere lithography combined with reactive-ion etching demonstrates a feasible strategy to achieve large-scale photonic crystals with structural color. In this work, polymethyl methacrylate (PMMA), namely plexiglass, was firstly used as photonic crystals substrate to fabricate large-area and novel nanopillar arrays via reactive-ion etching monolayer polystyrene (PS) sphere arrays. The height and diameter of plexiglass’ nanopillars can be controlled by adjusting PS size and etching time. In addition, PS sphere arrays exhibited charming structures like chrysanthemum after O2 plasma etching with higher intensity. The nanopillar arrays exhibited the tuned band-gap of such structures with different sizes and tunable resonance peaks from 350 nm to 600 nm. The fabricated nanopillar arrays have potential applications in solar cells, self-cleaning materials, photonic crystals and nonlinear optics.
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